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UV-LED Light source for Mask alinger

① Exposure size: 4’’ 6’’ 8’’

② Wavelength: 365nm, 385nm, 395nm, 405nm

Single wavelength and Multi-wavelengths

③  Effective working area:
4'': 110*110mm
6'': 160*160mm
8'': 200*200mm

④  Uniformity: ≤4%  (max-min)/ (max+min) *100%

⑤ Intensity:
4'': >[email protected]  25A
6'':[email protected]   25A

8'': [email protected] 25A

⑥ Collimate angle:

4'': ≤1.8°

6'': ≤1.3°

8'': ≤1.2°-2°

⑦ Working distance: 100-350nm
⑧ Cooling method:Liquid cooling

                                 

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